Defect inspection - optical (broadband plasma, laser scanning)
BOTTLENECKKLA dominates optical defect inspection, and its broadband plasma and laser scanning systems set the sensitivity benchmark that rivals struggle to match.
Bright-field and dark-field optical systems scan wafers for particles, pattern defects, and process deviations. Broadband plasma or laser illumination feeds real-time defect data into yield management.
What the evidence shows
KLA has supplied broadband plasma wafer inspectors for 40 years.
bbp.kla.comRESCORED JUL 2026near-monopolyscaling5 companies
Who controls it
KLA CorporationApplied MaterialsOnto Innovation+2 more tracked
No independently verified market-size figure is published for this node yet.
Where it sits in the stack
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