Mask inspection
BOTTLENECKLasertec ships the only commercial actinic system for EUV mask inspection, and multi-year backlogs constrain supply.
Final check for pattern defects on finished masks before they reach the fab. EUV masks need actinic inspection at 13.5 nm to catch phase defects optical tools miss. Lasertec's ACTIS is the only commercial actinic system; multi-year backlogs give it strong pricing power.
Post-write inspection detecting pattern defects at the mask level; actinic (EUV-wavelength, 13.5 nm) inspection for EUV masks; optical/e-beam inspection for DUV masks.
What the evidence shows
Three suppliers—KLA, Applied Materials, Lasertec—hold about 75% market share.
businessresearchinsights.comWho controls it
Where it sits in the stack
Takes in: Written EUV or DUV mask
Sends on: Inspected mask with defect map; approved or sent for repair
Full scorecard, owner shares, supply edges and the full tracked roster are in the desk letter.
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